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高穩定性的質量流量計－氣體流量控制不受上流和下流端壓力變化的影響。不同壓力感測，采用壓力鈍感模式
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采用不同壓力感測即鈍感模式
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縮小氣體柜的體積（不再需要壓力傳感器，調壓閥和過濾器）
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流量控制量程范圍廠
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精度高
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提高產能－可以提供標準流量給半導體制程。
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D212
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Maximum Full-Scale (N2)
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10 / 20 / 30 / 40sccm
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50sccm ~ 10slm
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Operating Inlet Pressure
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14kPa (g) ~ 350kPa (g)
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250kPa(g) ~ 350kPa(g)
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Maximum Outlet Pressure
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≤13.3kPa (a)
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≤53.3kPa (a)
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≤13.3kPa(a)
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≤53.3kPa(a)
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Accuracy under Digital mode
(per SEMI Standard E56-1296)
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±1% S.P.
(35 ~ 100%)
±0.35% F.S.
(2.5 ~ 35%)
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±1% S.P.
( 50 ~ 100%)
±0.5% F.S.
(30 ~ 50%)
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±1% S.P.
( 5 ~ 100%)
±0.05% F.S.
(0.5 ~ 5%)
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±1% S.P.
( 10 ~ 100%)
±0.1% F.S.
(2 ~ 10%)
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Control Range under Digital mode (% F.S.)
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2.5% ~ 100%
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30 ~ 100%
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0.5 ~ 100%
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2 ~ 100%
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Recommended Re-Zero Term
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once/ year
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Valve Type (PIEZO)
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Normally Close
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Linearity
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±0.5% F.S.
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Repeatability
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±0.3% S.P. ( 10~100%)
±0.03% F.S. ( <10%)
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Response Time
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800 msec.
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Proof Pressure
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500kPa(g)
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Burst Pressure
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1MPa(g)
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Leak Integrity
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<5×10-12 Pa·m3/s (He)
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Wetted Materials
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SUS-316L , INCONEL
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Operating Temperature
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15 ~ 45°C
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Flow Rate Setting Signal
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0 ~ 5VDC or RS485 F-NET Protocol
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Flow Rate Output Signal
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0 ~ 5VDC or RS485 F-NET Protocol
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Power Requirement
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± 15V ± 5%, 150 mA
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Fittings
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1.125inch width 1/4VCR , C-seal , W-seal
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Installation Orientation
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Attitude Insensitive
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D214
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Maximum Full-Scale (N2)
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10 / 20 / 30 / 40sccm
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50sccm ~ 10slm
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Operating Inlet Pressure
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14kPa (g) ~ 350kPa (g)
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250kPa(g) ~ 350kPa(g)
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Maximum Outlet Pressure
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≤13.3kPa (a)
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≤53.3kPa (a)
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≤13.3kPa(a)
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≤53.3kPa(a)
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|
Accuracy under Digital mode
(per SEMI Standard E56-1296)
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±1% S.P. (35 ~ 100%)
±0.35% F.S. (2.5 ~ 35%)
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±1% S.P. ( 50 ~ 100%)
±0.5% F.S. (30 ~ 50%)
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±1% S.P. ( 5 ~ 100%)
±0.05% F.S. (0.5 ~ 5%)
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±1% S.P. ( 10 ~ 100%)
±0.1% F.S. (2 ~ 10%)
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Control Range under Digital mode
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2.5% ~ 100% F.S.
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30 ~ 100% F.S.
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0.5 ~ 100% F.S.
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2 ~ 100% F.S.
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Recommended Re-Zero Term
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once/ year
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Valve Type (PIEZO)
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Normally Close
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Linearity
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±0.5% F.S.
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Repeatability
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±0.3% S.P. ( 10~100%)
±0.03% F.S. ( <10%)
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Response Time
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800 msec.
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Proof Pressure
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500kPa(g)
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Burst Pressure
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1MPa(g)
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Leak Integrity
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<5×10 -12 Pa·m 3 /s (He)
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Wetted Materials
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SUS-316L , INCONEL
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Operating Temperature
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15 ~ 45°C
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Flow Rate Setting Signal
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Device Net
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Flow Rate Output Signal
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Device Net
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Power Requirement
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11~25VDC 4VA
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Fittings
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1.125inch width 1/4VCR , C-seal , W-seal
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Installation Orientation
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Attitude Insensitive
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NOTE
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There are special variations for low inlet pressure condition. Please contact our local office if you have request / any questions about it.
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